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Panasonic Etcher/Metal
Active
Make: Panasonic
Model: E654
 
Ulvac NE7230
Active
Make: Ulvac
Model: NE7230
 
Samco RIE-10NR
Active
Make: Samco
Model: RIE-10NR
 
Shibaura CDE-80
Active
Make: Shibaura
Model: CDE-80
 
TEL Dry Etcher
Active
Make: TEL
Model: Unity etc.
 
AMAT Dry Etch
Active
Make: AMAT （Applied Materials)
Model: Centura etc.
 
Commonwelth 8J Ion Milling
Active
Make: Commonwelth
Model: 8J etc.
 
NS 20IBE-J Ion Milling
Active
Make: NS
Model: 20IBE-J
 
Lam Dry Etcher
Active
Make: Lam Reserch
Model: R4420 etc.
Ulvac Dry Etch
Active
Make: Ulvac
Model: NE7230
 
TOK's Dry Etch
Active
Make: TOK
Model: 60K
 
PSC / 456 AVL
Active
Make: PSC
Model: 456 AVL
 
LTK ARCHN200
Active
Make: LTK
Model: ARCHN200
 
Kokusai U-722 Dry Etch
Active
Make: Kokusai
Model: U-722
Hitachi IM-6-6 Ion(Beam) Milling_
Active
Make: Hitachi
Model: IM-6-6
 
Hankook JSPCS
Active
Make: Hankook
Model: JSPCS
GaSonics AE2001_
Active
Make: GaSonics
Model: AE2001
 
Anelva's Dry Etch
Active
Make: Anelva
Model: SPC-350 etc.
Shibaura CDE　series_
Active
Make: Shibaura
Model: CDE-80/73
 
GPT Gamma
Active
Make: GPT
Model: Gamma
 
Fusion/Axcelis Asher
Active
Make: Fusion/Axcelis
Model: 202ACU etc.
 
Plasma system DES series Asher
Active
Make: Plasma system
Model: DES212


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