Deposition Chamber: 18" dia x 14" high, stainless steel with 2" view port. Chamber: 18" dia high, stainless steel with 4" view port. Source tray: 18" flat plate with evaporation source mounted. Tray swings out 90 degrees to front of chamber for easy access. High Vacuum Valve: Bellow sealed poppet valve design 7.75" ID stainless steel. CTI Model CTI-8 Cryo Pump and compressor with manual regeneration. Valve sequencer: Airco Temescal fully automatic valve sequencing. Inficon IC 6000 Deposition Controller head and feed through, interfaced to shutter and power supply. Instrumentation: Granville Phillips Model 270 Ionization gauge/thermocouple. Shutter: Pneumatic shutter assembly interfaced to monitor. Liquid Nitrogen Controller: Airco-Temescal Model LC-1 Automatic LN-2 Level control in cold trap. Fixturing drive: Airco-Temescal Model MC-4 variable speed motor controller with drive motor and feed-thru. Electron Beam Power Supply: Airco-Temescal Model CV14 14KW for single gun operation. Temescal STIH-270-2 (25cc per pocket) Four Pocket electron beam gun with motorized pocket indexer. Temescal X-Y sweep. Mechanical pump: Oil free scroll pump. Full set of manuals. Can be configured to suit. Additional options are available.
$100,000 Operational
$120,000 Rebuilt with warranty
Company: Technical Engineering Services Contact Name: David Lloyd
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Ad Number: 6849
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