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Vac1

Location:

California

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Active

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Description:

DEPOSITION CHAMBER:
 20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading. Water-cooled
 18-inch diameter stainless steel, evaporation source chamber with viewport
 Isolation valve between substrate and source chambers.

PUMPING SYSTEM:

Cryogenic pump
 CTI-8 cryo with SC helium compressor
 Austin Scientific automatic cryo regeneration controller.

ROUGHING PUMP
 27 cfm roughing pump

HIGH VACUUM VALVES

High Vacuum poppet valve
 Roughing, Leak-check, Backing, and Vent Valves

VACUUM CONTROLLER:
 Temescal Auto/Manual vacuum sequence controller.

CHAMBER GAUGING:
 Versavac combination ionization and TC gauge.

DEPOSITION:

E-beam
 6 pocket Electron Beam Gun
 6 pocket crucible indexer.
 CV-14, 14kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:
 Electro-pneumatic source shutter:

DEPOSITION Controller
 Lebold ? Inficon IC 5 Quartz crystal deposition controller
 Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT: Optional

SUBSTRATE FIXTURING:
 Planetary or Lift-off tooling available.
 Substrate rotation assembly with variable speed drive motor.

SYSTEM DOCUMENTATION:OEM manuals.