CPA 9900 In-Line Sputtering System

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tescal

Location:

California

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Closed

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Description:

CPA 9900, Three cathode, sputter down, liner scanning system.

* Process chamber has three cathode positions - size of cathodes are 11.5 x 4".
* RF and DC magnetron cathodes are available.

* One load and one unload chamber, with 10 position pallet capacity in each
chamber.

* Pallet size is 8.5" x 8.5"

* Pallet indexing is manual.

* Pallet transport with speed control.

* MFC gas flow control system.

* Capacitance monometer with pressure readout.

* Throttle valve.

* Auto valve sequencer.

* Substrate heating can be offered as an option.

* CTI-8 Cryo pump and compressor.

* Power hoist for chamber lid.

* Mechanical pump.

* Full set of manuals.

* Can be configured to suit.

* Additional options are available.


Basic System Description. Manual Operation: The CPA 9900 In-line Sputter pallets are manually lowered onto the transport mechanism and moved through the process chamber at a fixed speed.

After the first pallet reaches the chamber at the far end, it will be manually raised into the stacking system and ready for the next pallet to be
completed. After processing all 10 pallets, if needed, the pallets can be sent back through for additional processing. Once complete, the load locks and process chamber can be vented to remove completed substrates and a new batch can be loaded.