900 Series In Line Sputtering System.
Load-lock chamber with CTI On-board cryo pump
Main process chamber with CTI On-board cryo pump.
Three DC magnetron target assemblies.
Target 1: Ti material, MU Inset cathode
Target 2: Au material, UPSILON Inset cathode, single piece
Target 3: TiW, MU Inset cathode
AE MDX 10kW DC sputtering power supply.
RF Sputter Etch Station with AE RFG 1250 RF generator w/ auto tune matching network.
Single process gas, MFC calibrated 100 sccm Ar.
Polycold compressor with water pump in process chamber.
Computer control system for on-button operation.
208V, 3 Ph, 50/60 Hz.
Company: Semicore Equipment Inc Contact Name: Matthew Hughes Status:Premium Member
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About this KDF 943 listing - This is a for sale classified ad for a used, surplus or second hand KDF 943 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this KDF 943 listing or view this user's member profile for detailed contact info.
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