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6" CVC 601 Sputter System

Statistics: views/answers:35/0
Posted by:
sjvassociates
Location:
California
Ad Status:
Active

Manufacturer:
Type:
Model:
601 Cryopumped
Year (or range of years):
Condition:
Rebuilt 2002
Price (in US dollars):
59,500.00 USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
Four 8" cathode sputter up system
with RF Etch.

Plasmatherm HFS3000E and HFS 1000E RF and Etch power supplies with auto matching network.

Rotating substrate carrier with auto controller.

Interlock status panel with Shutter control.

MFC (mass flow controller)

MKS digital readout PDR-C-2C pressure controller with 122A baratron.

CVC interlock control panel.

Granville-Phillips model 307 Ion / Convectron gauge controller.

CVC model AVC 385A automatic valve controller with throttle valve.

CTI-8 Cryopump and compressor with Leybold D60 roughing / backing pump.

One set operation and maintenance manuals.

Company: SJV Associates Inc.
Contact Name: Steven Verley
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Member Details

Ad Number: 167711
About this CVC 601 Cryopumped listing - This is a for sale classified ad for a used, surplus or second hand CVC 601 Cryopumped equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this CVC 601 Cryopumped listing or view this user's member profile for detailed contact info.
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