Load Lock Production Sputtering System with carriers for up to 16.5" x 22" substrates.
Covered Load table with PLC control, EMO, carrier transport system controller.
Load lock chamber turbo pumped with 2 Kw RF etch (auto match) and auto quartz heaters, carrier transport system controller, Leybold roughing pump.
Process Chamber turbo pumped with 3 cathode positions and 2 PK500L (19" x 2.75") DC magnetron cathodes installed. Two (2) 15Kw DC power supplies, Ion and Pirani tube pressure controllers, carrier transport system controller, Leybold roughing pump, auto process and multiple MFC gas control.
Inficon Quadrex 100 RGA
Spare parts and
complete set of Leybold Operation & Maintenance manuals.
Company: SJV Associates Inc. Contact Name: Steven Verley
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Ad Number: 167712
About this Leybold Z600 Production Coater listing - This is a for sale classified ad for a used, surplus or second hand Leybold Z600 Production Coater equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Leybold Z600 Production Coater listing or view this user's member profile for detailed contact info.
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