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Stainless Steel Process Chamber-water cooled, Process Chamber has a LN2 Full Flood Meissner Trap with Controller, Process Chamber is pumped by model CTI-8 Cryo pump with compressor, Compteck Model Vari-Q motorized throttle valve, Stainless Steel load-lock chamber with substrate heat, Balzer Load-lock Turbo Pump Model TPH 170 and Controller Model TLP300, Perkin Elmer Main System controller PN# 090-6007, Perkin Elmer Ion Gauge III Control Model 1003623 with Ion Gauge Tube Selector, Perkin Elmer precision table rotation speed control, Perkin Elmer load lock heat controller, 5 KW Eratron R F power supplyy and controller used for Sputter Etching and Bias Sputtering, 3 KW Eratron R F power supply and controller for sputtering dielectrics, 10 KW Eratron D C Power Supply Model 621o M.F. System can be upgraded with computer controlled interface
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