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Used Pecvd Systems
Statistics: views/answers:98/0
Posted by:
hamequip
Location:
Massachusetts
Ad Status:
Active
Company:
HAM EQUIPMENT Inc
Announcement Type:
New Product Release
URL:
http://www.hamequip.com

Description:
3 PECVD systems available. All in great condition with Pick and Place robotic systems.
ASM America Plasma IIIA Dual-Chamber Plasma Enhanced CVD

Dual-chamber plasma enhanced low pressure chemical vapor deposition system, 480V, 60Hz, 3ph, 65A, w/ (1) Advanced Energy LDM Plasma source generator; (2) MKS 152 automatic pressure controller. Includes: PRI 5100 loader robotics w/ 4-axis arm.
Manufacturer: ASM America
Model: Plasma IIIA
Serial: 081136

Company: HAM Equipment Inc
Contact Name: Brian Mitchell
Status: Premium Member
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Ad Number: 157472
Used Pecvd Systems, HAM EQUIPMENT Inc
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