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TS-series horizontal type E-beam optical coaters
Technical data:
1), Based on the windows operation system with monitoring software plus Inficon or Maxtek quartz crystal film thickness monitoring system of full parameters digital setting, it is available to realize constant evaporation ratio in depositing process and auto monitoring over coating thickness.
2), Adopting OFTM optical coating thickness monitoring and control system composed of highly stable light source, optical fiber receiving system, high performance phase lock amplifying unit and spectrograph, etc.
3), Adopting high capacity e-type e-beam gun of new generation, available to coat stably from several layer to tens of layers with modules of set-in e-beam scanning unit, precise orientation unit for crucibles, movable gun mechanical unit, etc.
4), Adopting advanced and powerful swing type Hoare ion source with double filament cathode or hollow cathode of auto switch function.
5), With specially designed, multi-functional substrate rotation methods of revolution or by satellite rotation rack.
6), Equipped with high vacuum pump group plus cryo-pump (Poly-cold) system to insure high productivity and stability.
Contact: Alex Li
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:43/0
