4 Station BOE System with Robot Transfers in each Enclosed Station.
Touch screen recipe driven control for each of the 4 modules.
Lift/Transfer robot in each module for two 6 in. wafer cassettes.
Each module contains one 17 in. L x 9 in. W x 9 in. H quick dump rinse and one 16 in. L x 8 in. W x 11 in. H temperature controlled bath with pneumatic lid.
Includes external temperature system.
Overall Dimensions: 119 in. L x 70 in. W x 84 in. H.
Constructed of FM 4910 protocol fire retardant materials.
Previously used as buffered oxide etch system.
Company: Bid-Service LLC Contact Name: Don Eilenberger Status:Premium Plus Member
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Ad Number: 155457
About this AMERIMADE TECHNOLOGY 10FT-WPS-FM4910 listing - This is a for sale classified ad for a used, surplus or second hand AMERIMADE TECHNOLOGY 10FT-WPS-FM4910 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this AMERIMADE TECHNOLOGY 10FT-WPS-FM4910 listing or view this user's member profile for detailed contact info.
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