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JEOL JSM-6340F System
ITEM DESCRIPTION QUANTITY
1 System Configuration
a. Basic configuration
? Basic Scanning Microscope 1
? Specimen Exchange Airlock 1
? Recorder for Scanning Image 1
? UHR Recording Camera 1
? Polaroid #550 Film Holder 1
? Stage Controller 2
? USP-401 Power Supporter for Ion Pump 1
? EYELA Coolace CA-2500 Chiller 1
? HP LaserJet 2420 1
? HP PC 1
b. Optional Configuration (Included)
? SM-34080 Lower SE Detector 1
? Backscattered Electron Detector 1
? Penning Vacuum Gauge 1
? Back-up Power supply for Ion Pump 1
? Liquid Nitrogen Trap 1
2 Principal Specifications
a. Performance
SEI Resolution : 1.2 nm guaranteed (Acc. V. = 15kV)
2.5 nm guaranteed (Acc. V. = 1kV)
Magnification : x 25 (WD 25 mm) to x 650,000
Accelerating Voltage : 0.5 to 2.9 kV (10 V steps)
2.9 to 30 kV (100 V steps)
Probe Current : 2 x 10-9 to 10-13 A
Image Mode : SEI, LEI
b. Electron Optical System
Electron Gun : High-resolution Conical Anode Field Emission Gun with Cold Cathode
Alignment : Mechanical and Electromagnetic Deflection
Condenser lens (C.L.) : Electromagnetic 2-stage zoom lens
Objective lens (O.L.) : Superconical CF (corrected field) lens
O.L. Apertures : Variable, 4-step click-stop type
c. Specimen Stage
Type : Fully Eccentric Goniometer
Movement : X = 50mm, Y = 70mm, Z = 23mm
Tilt = -5* to +45*
Rotation = 360* endless (motor driven)
Motorized movement for all 5 axes.
d. Specimen Chamber
Max Specimen size : 100mm or 4inch diameter
Specimen Exchange: Airlock type (100mm dia. or less)
EDS Detector : WD = 15 mm
Take-off Angle = 20*
e. Display System
Display Tubes
Observation: One, 17-inch color CRT
Recording : One, 5-inch ultra high resolution short-persistence CRT
Scanning Modes : PIC (Full, ½ & ¼ frame), Bright-up, line Profile, Spot
Display Modes : NORM, WFM, D-MAG, YZ Mod, FREZ, DUAL Display, Different magnification Images
Auto Functions : Auto Focus, Auto Astigmatism Correction, Auto Contrast & Brightness
Image Memory : 1280 x 1024 x 8 bits
3 EDS Software (Later version)
Oxford Model INCA X-ray Micro-analysis System With SEM Quant and Mapping
4 Condition Of Equipment
? Maintenance service : Yearly serviced by Jeol Asia (last service carried out in Jun 2006)
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