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Asia and Pacific - South Korea

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1. Maker : WATKINS-JOHNSON U.S.A)
2. Model : WJ-999TEOS (Current use WJ-999R)
3. Mainframe serial number : 4781
4. Handler Version : v11.4
5. Process : Hybride BPSG
6. Hardware Configuration
1) Software version
Monitor : 2.45ver WJ-952 GCU 3.55a
WJ-955 V2.55 Overtemp controller V1.2
WJ-996 4.35v PLC 1.34ver
2) Injector : Parallel type injector (15.45inch)
3) Toroidal Orifice (Small size)
4) Primary power box
5) Flat wound belt
6) Muti-zone resistance belt
7) Ultasonic Cleaner
8) MKS Throttle valve control (50mm)
9) Gas box (O2, D1N2, SPN2, D2N2, SiH4, PH3, B2H6)
10) Inject lift hoist
11) Handler hardware version : 9.1ver 11.4ver
12) UTC-800 Robot controller & Manipulator
13) Ceramic manipulator arm