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Used Applied Materials mark II for sale - Enlarge Picture Used Applied Materials mark II for sale - Enlarge Picture Used Applied Materials mark II for sale - Enlarge Picture

AMAT P5000 MARK II CVD Reactor

Statistics: views/answers:188/2
Posted by:
levyr
Location:
New Jersey
Ad Status:
Active

Manufacturer:
Type:
P5000
Model:
mark II
Year (or range of years):
1993
Condition:
Excellent
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
Three Chambers cluster tool configured for processing 200mm wafers:

•CH-A: dual frequency lamp heated TEOS, oxide deposition chamber, doped and undoped, plasma enhanced with RF generator 350-450C range
•CH-B: DxZ Nitride, DxZ style chamber, Nitride and silicon deposition typically 250-480 C deposition, plasma enhanced with Compact 2KW RF generator
•CH-C: SiC, DxZ chamber, Silicon carbide and carbon deposition chamber, 250-480C range, plasma enhanced with compact 2KW RF generator
•Gas panel: P5000 gas panel with TEOS hot box
•Remote rack; AC remote rack with AMAT 1 style heat exchanger, 65C heat range
•vacuum pumps (4) CH-A, CH-B, CH-C and load-lock

For additional photos, please refer to our website:

www.photonicmicrodevices.com



Company: Photonic Microdevices Inc.
Contact Name: Roland Levy
Status: Premium Member
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Ad Number: 129374
About this Applied Materials mark II listing - This is a for sale classified ad for a used, surplus or second hand Applied Materials mark II equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Applied Materials mark II listing or view this user's member profile for detailed contact info.
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