Novellus C1 Data Collection Worksheet Y/N Comments (Make/Model, operational or not, etc.) if Applicable
Asset Number: wlms 150
Make/Model: Novelus C1-200
Process: Chemical Vapor Dep
Vintage: 1994
S/N: upon request
Touch Screen Monitors: No
Make and Model of Monitors: Optiquest
Computer type: No Name
Software Version: 4.41
Keyboard/Monitors/floppy drive: Yes
Robot type: 1 arm novellus robot
Optical pin search: Yes
Micro-contamination package: Asyst Smif enclosure
Quad/24 90V (OAR) Installed: No
Megapac 7 Output installed: Yes
Pneumatic Panel a 34 Valve installed: Yes
200mm Heater Block: Yes
Standard Vac Stack: Yes
Remote AC: Yes
HF RF Gen………make and model Advanced Energy - RFG-5500
LF RF Gen………make and model ENI Plasma Loc-2HF
Trazar RF Matching network: Yes
TEOS delivery system: Y
Make:
Novellus cabinet for TEOS liquids - Sigma 6
cabinet
Quartz window for Endpoint detection: Yes
Loadlock Throttle/gate Valve
Extended and heated: Yes
Proteus Flow Software: Yes
SECS/GEM interface: Yes
Wafer-on-Paddle sensor (WOPS): Yes
Load Lock Convectron Pressure Sensor and
Capacitance Manometer: Yes
Two or Three 25-Slot, Metal Cassettes: 2
Gasses:
Gases/liquids: Nitrous oxide , sliane , ammonia
, oxygen , nitrogen. Set up to run C4F8O as a
cleaning gas.
Status: (Installed/Operational, Crated, etc.)
Company: n/a Contact Name: mark mccorkle Status:Premium Member
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About this Novellus concept 1 listing - This is a for sale classified ad for a used, surplus or second hand Novellus concept 1 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Novellus concept 1 listing or view this user's member profile for detailed contact info.
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