ASM Pulsar 2000 Atomic Layer CVD Reactor - Can be Used on a Polygon Cluster Tool
This unit was Intel surplus. It is being sold as-is. All we have is the reactor portion.
The Unit's Serial Number Tag Reads:
Model Number: Pulsar 2000
Serial Number: 00W5201
Power Requirements: 400 VAC, 3 Phase, 50/60 Hz, 22 A, 11 kW
Date: 2000
CE Marked: Yes
Description:
THe Pulsar 2000 is the first ALCVD reactor for R&D and production IC applications. It is a module that can be connected to the Polygon cluster tool and is for single wafer thin film deposition on 200 mm wafers.
ASM Microchemistry is the inventory and the world's leading innovator and supplier of Atomic Layer CVD modules and reactors.
ALCVD technique is a surface-controlled, layer-by-layer process for the deposition of thin films with atomic layer accuracy. Each atomic layer formed in this sequential process is a result of saturated surface-controlled reactions. The surface-controlled growth mechanism of ALCVD provides excellent step coverage and dense films with no pinholes. The precision achieved with ALCVD allows processing of extremely thin films in a controlled way in the < 50 range.
ALCVD reactors are versatile. Many different thin films can be produced using the same tool. For example nanolaminates and other mixed oxides can also be easily and quickly produced in the ALCVD reactor.
Features:
# MESC-compatible single wafer ALCVD process module
# 150 - 300 mm (This unit is believed to be setup for 200 mm) wafer sizes
# 200 - 400°C deposition temperatures
# Up to 20 wph throughput
# Up to 200 /min growth rate
# Uniformities: < 1.2% within wafer and < 1.3% wafer to wafer
Semiconductor Applications:
# High-k gate dielectrics for advanced CMOS (EOT approaching < 1 nm)
# Diffusion barriers for copper metallization
# Dielectric layers for memory capacitors and RF applications
# Passivation layers
# Dielectric and metal layers for integrated passives and MRAM
# Films for optical applications with different refractive indices
# Thin films for large-area flat panel display (FPD) applications
# Dielectric layers for GMR and TMR magnetic heads
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status: Premium Member
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About this ASM Microchemistry Pulsar 2000 listing
- This is a for sale classified ad for a used, surplus or second hand ASM Microchemistry Pulsar 2000 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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