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AMAT P5000 P-SiH4 6inch 2chamber

Statistics: views/answers:341/3
Posted by:
kkossi
Location:
Asia and Pacific - Japan
Ad Status:
Active

Manufacturer:
Type:
Model:
P5000
Year (or range of years):
1995
Condition:
Excellent
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
- Model Mark Ⅱ - J
- Serial Number 4716
- Wafer Size 150 mm
- Vintage 1995. 10
- SBC Board Version SV21
- Mainframe Stand Alone
- Chamber Location A/B
- Harddisk Yes
- Floppy Disk 3.5inch
- Gas Pannel 28line
- L/L chamber Boltdown
- RobotType Phase3
- Cont Purge Yes
- Storage Elv. 8Slots
- Wafer IO Sensor Yes
- RF Gen OEM-12B
- Heat exchanger AMAT0
- MFC Model
LINTEC MC-1100
- Gas configuration
(each chamber)
SiH4 300
N2 3000
N2O 1000
NF3 1000

Company: n/a
Contact Name: Kazun Kosh
Status: Premium Member
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Ad Number: 276419

About this AMAT P5000 listing

- This is a for sale classified ad for a used, surplus or second hand AMAT P5000 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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