Reactor is currently installed an available for a demo
Serial Number CS12015-2
Vintage 2000
MO Sources
Currently 5/7 in use
S1 Cp2Mg – 1
S2 Cp2Mg – 2 (spare)
S3 TMAl
S4 TMGa – 2
S5 TMGa – 1
S6 TMIn – 1
S7 TMIn – 2 (spare)
Gasses:
100ppm SiH4
NH3
N2
H2
PH3 (for use if converted to III-V)
AsH3 (for use if converted to III-V)
Installed Parts:
2 year-old showerhead
2 year-old heater
Pd cell H2 purifier
Epison flow sensors on TMGa and TMIn
KSA MiniMOS inisitu high resolution stress monitoring instrument
Alcatel glovebox pump - new
Ebara 825 process pump – recently rebuilt
Alcatel regen pump – old
Spare Parts
New showerhead
New heater
New Pd cell H2 purifier
Assorted quartz and graphite for 2”, 4”, and 6” processes
Alcatel glovebox pump - old
Ebara 825 process pump – recently rebuilt
LLydel chiller for 0°C to 80°C temp control for showerhead
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About this Thomas Swan CCS-MOCVD 6x2 listing
- This is a for sale classified ad for a used, surplus or second hand Thomas Swan CCS-MOCVD 6x2 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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