CVD SYSTEM, 2 CHAMBER TEOS Oxide CVD
Originally configured for TiN but converted to TEOS.
Lines and heaters were added for TDMAT process.
RF Generators ENI
CH B P5000 CVD Universal chamber number 4161B, serial number 35393
CH C P5000 CVD Universal chamber number 4161C, serial number 35593-18
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About this Applied Materials P5000 listing
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