CAN BE OFFERED "AS IS" OR OPERATIONAL TO OEM SPECIFICATIONS Condition: very clean and completely decontaminated. No acid or corrosion is present. Current status: in the warehouse, in plastic wrapping. Can be inspected by appointment. The tool was maintained, upgraded and serviced throughout it's life by the OEM. Serial number: MCJ084 Model: MB2 730 HT HT Vintage: Apr 1997 dE-INSTALL DATE: FEB 2008 System was running production until shut down In elect rack: 2x Ebara TMP controller (306W), CVD Utility controller SECS/GEM: YES CE MARK: YES Main Frame MBB730 (2 x Wsix Deposition chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack Edwards dual GRC, D150 qty 2 Box with cable/Process kit/manuals Gases: N2 (Ox) 4lmin N2 (Red) 125l/min Ar 1000 sccm WF6 10sccm ClF3 1000sccm DCS 1000sccm Other utilities:- Voltage 208V +/- 10% 60Hz 70 KVA Water 5Kgf/cm2 max Water flow 20 l/min Water temp 15-25 celcius Exhaust volume 2.1 m3/min Air 5.7 =/- 0.3 Kgf/cm3 220 l/min Earth class 3 GND islotaed Weight 2300 kg room temp 20-25 c, humidility 40-55%
Company: n/a Contact Name: Randy randy@fabsurplus.com
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Ad Number: 293294
About this TEL MB2 730 HT 2 listing
- This is a for sale classified ad for a used, surplus or second hand TEL MB2 730 HT 2 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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