3 Chamber WSi CVD system CAN BE OFFERED "AS IS" OR OPERATIONAL TO OEM SPECIFICATIONS SN MC1068 Model: TEL MB2 730HT System was running production until shut down Manufacturered: Turned off: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL In elect rack: 3x Ebara TMP controller (306W), labelled for PM RH TMP, PM LH TMP, T-M TMP; CVD Utility controller Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack Edwards D150 dual GRC, qty 3 , Edwards PN A55222110, 208v 3 PHASE WEIGHT 380 KG Chiller TEL: 3 Box with cable/Process kit/manuals Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccm
Company: n/a Contact Name: Randy randy@fabsurplus.com
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About this TEL MB2 730 HT listing
- This is a for sale classified ad for a used, surplus or second hand TEL MB2 730 HT equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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