TEL Alpha 8S LPCVD reactor configured for deposition of PolySi, silicon nitride or silicon dioxide on 200 mm wafers. Tool is fully automated and features cassette-to-cassette operation and fast thermal processing capabilities.
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Ad Number: 56465
About this Tokyo Electron ZVFN FTP-LHP listing - This is a for sale classified ad for a used, surplus or second hand Tokyo Electron ZVFN FTP-LHP equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Tokyo Electron ZVFN FTP-LHP listing or view this user's member profile for detailed contact info.
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