used Tokyo Electron ZVFN FTP-LHP, refurbished Tokyo Electron ZVFN FTP-LHP for sale

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Used Tokyo Electron ZVFN FTP-LHP for sale - Enlarge Picture

TEL Alpha 8S ZVFN FTP-LHP

:622/1

Posted by:	levyr
Location:	New Jersey
Ad Status:	Closed

Manufacturer:	Tokyo Electron
Type:	Alpha 8S
Model:	ZVFN FTP-LHP
Year (or range of years):	1994
Condition:	Excellent
Price (in US dollars):	180,000 USD
Quantity:	1
Type of Seller:	Dealer Owner
Description:
TEL Alpha 8S LPCVD reactor configured for deposition of PolySi, silicon nitride or silicon dioxide on 200 mm wafers. Tool is fully automated and features cassette-to-cassette operation and fast thermal processing capabilities. Gases plumbed are: oMFC 1 - 5 slm O2 oMFC 2 - 20 slm N2 oMFC 3 - 5 slm N2 oMFC 4 - 5 slm ClF3 oMFC 5 - 500 sccm HCl oMFC 6 - 200 sccm SiH2Cl2 oMFC 7 - 5 slm House N2 oMFC 8 - 10 slm Ar oMFC 9 - 200 sccm SiH4 oMFC 10 - 2.0 sccm SiH4 oMFC 11 - 2 slm NH3 oMFC 13 - 10 slm H2 Tool is equipped with an Ebara Turbo Pump and TS-4000Z controller. Gas flow schematics and additional photos available upon inquiry.

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About this Tokyo Electron ZVFN FTP-LHP listing - This is a for sale classified ad for a used, surplus or second hand Tokyo Electron ZVFN FTP-LHP equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Tokyo Electron ZVFN FTP-LHP listing or view this user's member profile for detailed contact info.