Novellus Concept-3 / Arch Thin Film Systems Genstream I/II Chemical Delivery System for CVD
The Unit's Serial Number Tag Reads:
Model Number: Genstream I / II
Serial Number: 132
Part Number: 888027
Option: None
Power Requirements: 110/120 VAC, 60 Hz, Single Phase, 3-Wire, 1 FL Amps, 5 Trip Amps
Additional Information:
# Was used with Tetramethylsilane (Si(CH3)4, CAS 75-75-3) which is believed to be True-TEOS
# Software Revision 1.01
# On the top there are 4; RS-232 Ports
# There is a 25-Pin Parallel Dispense Out Connection
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