Spitfire/SPS model 52-SPX Wafer Polisher

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Classifieds / Semiconductor Equipment / Grinders & Polishers

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:54/0

Posted by:	speedstan
Location:	Arizona
Ad Status:	Closed

Manufacturer:	Spitfire/SPS
Type:	200mm wafer polisher
Model:	52-SPX series
Year (or range of years):	1990-2009
Condition:	remanufactured
Price (in US dollars):	USD
Quantity:	2
Type of Seller:	Dealer Owner
Description:
The model 52-SPX is a completely reengineered and remanufactured 52" silicon wafer polisher built on the frame of a 52" spitfire. New inverter-driven variable speed motor, new electronics & pneumatics, 4 pressure heads with individually motorized with independent speed and pressure control. New PLC, touch screen, and individual electronic pressure regulators for each head. Standard "419" version has 19" pressure plates for 12 each 200mm wafers per load. Optional "422" model has 22" pressure plates for 16 each 200mm wafers per load. Available with on-site setup/training, field service support, and warranty. Process development also available. A virtually new machine equivalent to the Speedfam SPAW series for a fraction of the price. Please contact us for more information.

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About this Spitfire/SPS 52-SPX series listing - This is a for sale classified ad for a used, surplus or second hand Spitfire/SPS 52-SPX series equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Spitfire/SPS 52-SPX series listing or view this user's member profile for detailed contact info.