Gaard 676 Chemical Mechanical Polisher
? Manufacturer: Novellus/SpeedFam IPEC
? Model: 676
? Wafer Size: 200mm
? 676 Mainframe with operator interface monitor
? System computers ? SysCon(1), Polish Heads(4), End point(1), and C2C(1)
? Advantgaard 676 3.0 revS System Software
? Brookside Endpoint Detection System with configurable algorithm to detect endpoint
? 4 Mechanical polishing heads with Advanced Pad Motion
? 3 systolic pumps for slurry or DI H2O
? High flow DI H2O rinse valve configuration
? Upper and lower pneumatics panel
? Hoist for upper motor and tower removal
? 2 Pad conditioning systems
? Cassette to Cassette (C2C) system
? Genmark Gencobot multi-axis robot with wafer pickup paddle
? Wet cassette assembly with wafer sensor array
? Spray box assembly
? C2C pneumatics panel
? Electrical cabinet with computer control station
? Safety interlocks on all panel doors and covers
Company: Global Fab Surplus Semiconductor Equipment LLC Contact Name: David Lee Status:Premium Member
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Ad Number: 99250
About this Novellus SpeedFam IPEC Gaard 676 listing - This is a for sale classified ad for a used, surplus or second hand Novellus SpeedFam IPEC Gaard 676 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Novellus SpeedFam IPEC Gaard 676 listing or view this user's member profile for detailed contact info.
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