Novellus Novascan 372 Oxide CMP w/ Integrated Novascan 210
372M Polisher Mainframe
200mm
Novascan Model 210 Thickness Measurement system
for monitoring of CMP polish rates. Using a reflectometer integrated onto the CMP platform, the NovaScan 210
performs thin film measurements while the wafer was in process. The solution provides for much faster time to data as well as early detection of process.
32 bit Hardware Upgrade (Adtron Thincard system)
SECS I/II Host Computer Interface
Floppy Drive
Printer/Terminal Interface Software
Software-Controlled Process Variables with Hi/Low Limits
Dual Sensor Loadcup
SFI Load Station Sensor RFK
Gaard Arm pad conditioner
7.5 hp Final Platen Drive System
750 lb. Down-Force Polisher Arm
Closed-Loop Load Cell Down-Force Control
High-Pressure Primary Polish Station, TUFRAM-Coated Platen
60 psi rating
Final Polish Station, TUFRAM-Coated Platen
1000 mL Flow Slurry Pumps (2 Primary - 2 Final)
Wafer Carrier Speeds (10-125 rpm)
Platen Speed (10-175 rpm)
Head Clean Station Quick-Dump Rinse Unit
Clean Station Float Sensor
Capacitance Level Sensor for Polish Tub
Slurry Manifold - BECO Valves
DI Manifold - BECO Valves
PRi compatible environmental hood
Moisture Sensor in Fluids Cabinet and System Base
Interfaced
Process Chilled Water Temp Gauges and Flow Meters
Fluids Cabinet Exhaust, AWN Interface - Underneath
Mushroom-style Emergency Machine Off (EMO) Buttons
Electrical Cabinet
Company: Global Fab Surplus Semiconductor Equipment LLC Contact Name: David Lee Status:Premium Member
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Ad Number: 99253
About this Novellus SpeedFam IPEC 372M listing - This is a for sale classified ad for a used, surplus or second hand Novellus SpeedFam IPEC 372M equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Novellus SpeedFam IPEC 372M listing or view this user's member profile for detailed contact info.
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