Plasma Cleaning System / Cleaner / RIE / Asher / E
Model:
Glen 1000-P, G1000-P, YES-G1000
Year (or range of years):
Condition:
Like-new, refurbished recently
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner
Description:
Yield Engineering / Glen Technologies 1000-P Plasma Cleaning System
This unit is in like new condition. It was refurbished some time ago and then vary rarely used. It is guaranteed to be in working condition. There is no vacuum pump included.
The Main Unit's Serial Number Tag Reads:
Model Number: Glen 1000-P
Serial Number: 10227
Power Requirements: 230 VAC, 50 Hz, Single Phase, 25 A, 5750 W (I am pretty sure this is a 50/60 Hz unit)
The RF Generator's Serial Number Tag Reads:
Model Number: 3157502-005A
Serial Number: 108784
Firmware Revision: A
Description:
The Yield Engineering / Glen Technologies 1000-P is a 1000 watt parallel plate plasma system designed to give uniform plasma over large sample trays. In the downstream mode, used for electron-free cleaning of sensitive hybrid parts, the system is totally load independent. In the Active and RIE modes, the system provides aggressive plasma for surface modification, etching, epoxy bleed removal, etc. The system will sequence up to 3 gases.
Specifications:
Chamber Type: Box
Rated Power Output: 1 kW
Reactor Center: Rectangular
Reactor Center Size: 17.50" D x 11" H (44.45 cm x 27.94 cm)
Number of Gas Inputs: 3
Automatching Network Included: Yes
RF Generator Type: Advanced Energy PE-1000 AC Plasma Power Source
Tray Configuration: 12 16"x16" sample trays, (4)Active, (4)Grounded, (4)Insulated
Total Chamber Capacity: 1536 square inches
PLC Controller Configurability: Up to 64 programs, Realtime process readout
Viewing Window: 2.5" dia.
Vacuum Connection: KF 40
CE Compliance: Yes
Power Requirements: 230 V, 25.0 A, 50/60 Hz, 1 Phase
Exterior Dimensions: 23.5" W x 30" D x 43.750" H (59.7 cm x 76.2 cm x 111.1 cm)
Weight: 364 lbs. (165 kg) - does not include packaging for shipment
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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About this Glen Technologies / Yield Engineering Glen 1000-P, G1000-P, YES-G1000 listing - This is a for sale classified ad for a used, surplus or second hand Glen Technologies / Yield Engineering Glen 1000-P, G1000-P, YES-G1000 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Glen Technologies / Yield Engineering Glen 1000-P, G1000-P, YES-G1000 listing or view this user's member profile for detailed contact info.
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