Reference id: 1570
Manufacturer: FSI *
Model: EXCALIBUR ISR *
Type: acid vapour clean
Condition: excellent
Vintage: Sep 1995
Sales Condition: as is where is
Quantity: 1
Comments: deinstalled, barrier bagged, warehoused at the warehouse of SDI, Avezzano, Italy CE marked Each systems contains two process modules and one control module. Footprint is: 75 inches X 47.25 inches. height is 69 inches Cycle time for a dual module system is 70 WPH using the standard 200 Angstrom etch. We had the system checked by a 3rd party service engineer. He reported that the system is basically sound. Here is a copy of his report, and I attach photos mentioned in the report:- Model 901498-301, Serial 0904-0098-0995 (later process module 909000-300, 0904-0137-0397) This system is dated September 1995. This was originally a single process chamber system. An additional module was added in March 1997. This second model has some later improvements. Control module. No issues here. All parts are present and whole. There are a full set of manuals in the lower storage area. There are some added items on the rear electronics panel these look like an interface to a factory gas detection system of data collection. These could be removed. (Pic 19). Process Module 1 Some contamination at the rear left of the slide rails and N2 regulator. All the systems seem to get this. Most of it comes from a standoff on the rear of the panel. It seems to corrode possibly due to its proximity to the extract manifold. (Pic 15). The HF bottle connection was not capped off, this showed signs of browning which seems to be normal for a used system, but no flaking. Cracked the connection at the top of the flexi pipe and this was also OK. Some rubber parts under the loader are starting to break up and crumble. System has a cold plate added to sit behind the cassette.
Company: SDI Semiconductor Instruments Group Contact Name: Brandon Newell Status:Premium Member
adid=63344
onClick='enterWindow=window.open("/favorits.php?adid=63344","Favorites","width=400,height=200,top=200,left=200"); return false'
onmouseover="window.status='Put this Ad in My Favorites'; return true;"
onmouseout="window.status=''; return true;">
Ad Number: 63344
About this FSI 0904-0098-0995 listing - This is a for sale classified ad for a used, surplus or second hand FSI 0904-0098-0995 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this FSI 0904-0098-0995 listing or view this user's member profile for detailed contact info.
:343/0
