Reference id: 8090
Manufacturer: TOHO
Model: MEGASONIC
Type: SC1 MEGASONIC HOOD
Condition: excellent
Vintage: Jan 1997
Sales Condition: as is where is
Quantity: 1
Comments: PLEASE REFER TO ATTACHED IMAGES FOR DETAILED SPECIFICATIONS. PROCESS FLOW SCHEMATIC IS:- STATION 0 LOADER 1 boat x 3 pieces STATION 1 CASSETTE CLEAN STATION 2 SC1 MEGASONIC STATION 3 HOT AND COLD DIW STATION 4 COLD DIW STATION 5 VAPOR DRYER STATION 6 UNLOADER Automatically Processing of 8" Wafers -2 ROBOTS -CE MARKED -SECS GEM COMPATIBLE -DEINSTALL REPORT AVAILABLE -USED WITH H2O2 AND NH4OH -4 Process Tanks and Boat Carrier Robot -Process direction from Left to Right -Boat for 8" KM-82 (KAKIZAKI) -CABINEX EN FIRE SUPRESSION system -FINE-SONIC VIBARATOR SYSTEM -FOXBORO 873RS ELECTROCHEMICAL ANALYSIS SYSTEM FOR RESISTIVITY MEASUREMENT. -IWAKI FA-40E BELLOWS PUMPS WITH IWAKI SC1 CONTROLLER. -KOMATSU E3X1 SERIES CHEMICAL CIRCULATOR. -OMRON E5AX DIGITAL temperature controller -CONSISTS OF MAIN FRAME,V/D FRAME,MEGASONIC SC1 QTZ TANK,QDR QTZ TANK,F/R QTZ TANK -WAFER LOAD 52 X 8 INCH WAFERS IN ONE BATCH Dims: 4900L X 1900W X 2480H -LIQUID LEAK DETECTOR AT BOTTOM OF HOOD -DI SPRAY GUN -N2 GUN AT UNLOADER -DIW PIPING WITH NO DEAD LEGS ALL MANUALS INCLUDED, OPERATIONAL, MAINTENANCE, SCHEMATICS, ELECTRICAL INTERCONNECT AND SUPPLIER MANUALS. LOADER ******** -MATERIAL FRPP WITH PTFE FOR CONTACT AREAS C/C **** -MATERIAL PTFE,chemical CDIW sc1 megasonic ************** -material quartz CHEMICALS C.DIW:NH4OH:H2O2 5:1:1 TYPE A OR 100:1:1 TYPE B CIRCULATOR- IWAKI FA-40VEW WITH KOMATSU PROCESS TEMP 25-40 CELCIUS HOT AND COLD DIW ******************* -material quartz COLD DIW ********** -material quartz VAPOR DRYER ************ -material S/S 316 electroplated -IPA based UNLOADER ********** -Material FRPP
Company: SDI Semiconductor Instruments Group Contact Name: Brandon Newell Status:Premium Member
adid=63400
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Ad Number: 63400
About this TOHO SC1 Hood listing - This is a for sale classified ad for a used, surplus or second hand TOHO SC1 Hood equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this TOHO SC1 Hood listing or view this user's member profile for detailed contact info.
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