Quantox 64000, a non-contact, corona-based silicon and oxide charge monitoring system configured for
wafer-to-wafer cassette handling of 200 mm wafers. System measures electrical characteristics such as charge composition, interface quality, dielectric thickness, and charge contamination of semiconductors and dielectric films. Measurements performed with easy to use Windows NT-based software interface. An Offline Recipe Generator and Data Analysis package provides added remote recipe generation and data analysis capabilities.
For specs and additional photos, please refer to our website:
www.photonicmicrodevices.com
Company: Photonic Microdevices Inc. Contact Name: Roland Levy Status: Premium Member
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Ad Number: 129396
About this Keithley Quantox listing
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