Machine is in very good condition and we can demo for customer inspection
System configured to accept 300mm or 200mm wafers, via an open cassette
Vintage: 2002
KLA-Tencor Surfscan SP1-DLS Wafer Surface Analysis System
Includes:
.050 Defect Sensitivity on polished bare Silicon.
Enhanced Edge Exclusion
Enhanced Rough Film Sensitivity
Argon Ion Laser (488 nm)
4 Dark Collection Channels (Normal Wide, Normal Narrow, Oblique Wide,
Oblique Narrow).
RTDC (Real Time Defect Classification).
Map to Map.
Measurement Chamber with ULPA Filter and Blower Unit.
Operator Interface.
Puck Handling- 300/200. 200 mm Edge Handling System Option.
Brightfield Option. Dual Plane Brightfield.
XY Coordinates.
SECS 1.
Purchased new for $1.1 Million
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Ad Number: 166375
About this KLA Tencor SP1-DLS listing - This is a for sale classified ad for a used, surplus or second hand KLA Tencor SP1-DLS equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this KLA Tencor SP1-DLS listing or view this user's member profile for detailed contact info.
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