FOR SALE: Post Wafer Dicing Cleaner for wafers mounted on film frames. Perfect condition, new in 2004 with less than 100 wafers use since original install. Advanced Engineering Model AE AWC-650- High Pressure DI water wash with N2 drying. Mfg Specs Below:
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Automatic Wafer Cleaner System
The AWC-650 Automatic Wafer Cleaner System leads the
way in post-dicing wafer cleaning. Highly efficient and
versatile in the removal of sub-micron particles from all sawed
and scribed substrates, the AWC-650 is a robust and flexible
system. This PLC-controlled system provides effective and
repeatable cleaning for worry-free processing of singulated
substrates. Process parameters are easily modified and
stored for building a process recipe library.
With the AWC-650, creating the washing and drying cycle
best suited to your application is a simple, menu-driven
procedure. The AWC-650 combines chuck rotation speed
and D.I. water jet pressure adjustment parameters for
customization of the cleaning process for each specific
application.
AE AWC-650 Features
1. PLC controller with convenient alpha-numeric LCD display.
2. Substrate sizes: up to 8" frame-mounted wafers.
3. High-pressure D.I. water pump.
4. Compact system size.
5. Purified Nitrogen drying at the end of the process cycle.
6. Built-in vacuum generator with auto-drain water trap.
7. Built-in exhaust blower.
8. Nitrogen puff wafer release.
9. Dicing frame safety lock chuck.
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AE AWC-650 System Utilities/Specifications
D.I. Water Pressure (max. output) 0.3 Mpa (3 kg/cm2)
D.I. Water Capacity (max. usage) Max. 1.8 liter/min
Drainage Capacity (min.) > 1.5 liter/min
Nitrogen (max. consumption) 70 NL/min
Air (CDA) (max. pressure) 0.5 ? 0.7 Mpa (5-7 kg/cm2)
Air (CDA) (max. consumption) 250 liter/min
Electrical 115/230Vac, 50/60 Hz
Power (max.) 1.8 kWA
Dimensions (H) 39? x (W) 16? x (D) 35?
Height with cover open: 59?
Weight Approx. 45.5 lbs.
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Ad Number: 76332
About this Advanced Engineering - AE AE AWC-650 listing - This is a for sale classified ad for a used, surplus or second hand Advanced Engineering - AE AE AWC-650 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Advanced Engineering - AE AE AWC-650 listing or view this user's member profile for detailed contact info.
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