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ASM A-600/UHV LPCVD

Statistics: views/answers:48/0
Posted by:
Tak
Location:
Asia and Pacific - All
Ad Status:
Active

Manufacturer:
Type:
Model:
A-600/UHV
Year (or range of years):
2000
Condition:
Good
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Non-Owner

Description:
Process: 50 wfs/batch
Gas=PH3(N2/1% STEC/SEC-F730MC),
SiH4(STEC/SEC-F730MC),
He(STEC/SEC-F730MC),
N2(SETC/SEC-F740MC&SEC-E440)
Resistance heater
(PM1 --- -PH3 Annealrng)
=Max temp :850 deg C Resistanceheater
(PM3 --- -HSG Si)
= Max temp : 800 deg C

20080227f2Y04

Company: Trust Technology Corporation
Contact Name: Ken Chokan
Status: Premium Member
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Ad Number: 106332
About this ASM A-600/UHV listing - This is a for sale classified ad for a used, surplus or second hand ASM A-600/UHV equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this ASM A-600/UHV listing or view this user's member profile for detailed contact info.