Serial number: MCJ084
Model: MB2 730 HT HT
Vintage: Apr 1997
DE-INSTALL DATE: FEB 2008
System was running production until shut down
In elect rack: 2x Ebara TMP controller (306W), CVD Utility controller
SECS/GEM: YES
CE MARK: YES
Main Frame MBB730 (2 x Wsix Deposition chambers)
Maintenance Table
UI-Rack
Additional breaker box
MBB-730 Main Power Distribution
Power Rack
Edwards dual GRC, D150 qty 2
Box with cable/Process kit/manuals
Gases:
N2 (Ox) 4lmin
N2 (Red) 125l/min
Ar 1000 sccm
WF6 10sccm
ClF3 1000sccm
DCS 1000sccm
Other utilities:-
Voltage 208V +/- 10% 60Hz 70 KVA
Water 5Kgf/cm2 max
Water flow 20 l/min
Water temp 15-25 celcius
Exhaust volume 2.1 m3/min
Air 5.7 =/- 0.3 Kgf/cm3 220 l/min
Earth class 3 GND islotaed
Weight 2300 kg
room tem
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 135011
About this Tokyo Electron MB2 730 HT HT listing - This is a for sale classified ad for a used, surplus or second hand Tokyo Electron MB2 730 HT HT equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Tokyo Electron MB2 730 HT HT listing or view this user's member profile for detailed contact info.
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