Refurbished Semco Athena Quad Stack Diffusion Furnace-tube configuration for 4 or 5 inch Si, tube 1-top-LPCVD Nitrate, tube 2-LPCVD teos, tube 3-low pressure phos dep POCI3, tube 4-low pressure phos dep POCI3. 3 phase power UK configuration. Gas jungles all MFC with seperate inlets for N2/O2 and special gases for LPCVD. DPC all by dedicated Semco Mycore programmers re Temp/Loaders/Gases. DTC is Eurotherm. Class 10 horizontal flow load station. Si C cantilever paddle system. Limited spares and extras ie furnace elements. Right Hand. Call or email with any questions at 847/217-5546.
Company: n/a Contact Name: Greg McCarroll Status:Premium Member
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Ad Number: 135446
About this Semco Athena listing - This is a for sale classified ad for a used, surplus or second hand Semco Athena equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Semco Athena listing or view this user's member profile for detailed contact info.
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