Posted by:

danbane

Location:

U.S.A.

Ad Status:

Closed

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

Watkins Johnson 1000T APCVD Furnace
Serial Number 5494
200mm Wafer Configuration
BPSG Deposition Using Teos Process
Bulkhead Mounted
Automated, continuously cleaned, cassette to cassete wafer transport system with slot-to-slot integrity
Four Process Chambers
25 Heated Zones in Muffle
Single Ozone Generator w/ Four Generating units and one Controller
Metal Seal MFC Option
Teos Bulk Fill Interface
Al2 O3 Haynes belt with modified belt cleaning system to reduce backside contamination
Astex CO2 O3 Generator
Muffle Etch Hour Meters
Enhanced Exhaust Configuration
Windows Based Software Operation
SECS Computer Interface