Solar Cell Deposition System

Posted by:

ProTemp

Location:

Asia and Pacific - China

Ad Status:

Closed

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Model:

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Description:

SolaReactor™ POCl3 Deposition System

High production volume — capability for processing >15 million 156mm sq. substrates per year (1,750 substrates/hour)

Designed Specifically for the Solar Industry

Cantilever auto-loaders on each tube level

Mass Flow Controlled gas systems on all tube levels

Compact—<44 ft2 floor space for complete system

PC-controlled for functional capability and ease of operation

HOST computer with color monitor and keyboard/mouse controls

POCl3 and PECVD processes available in same system frame

Heating elements with 8” dia./156mm square substrate processing capability

Processes either poly-crystalline or mono-crystalline substrates

Fully automatic insertion/retraction of pre-loaded substrate boats

Includes quartz process tubes

Includes POCl3 temperature control systems

Baseline POCl3 deposition processes included

Drawings for all quartz ware supplied with system

Incorporates proven technologies developed over the last 40 years in semiconductor and solar industries

Start-Up Assistance and qualification at customers facility available