PECVD furnace system

Posted by:

ProTemp

Location:

California

Ad Status:

Closed

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Description:

SolaReactor™ Multi-Process System

High production volume — capability for processing >5 million 156mm sq. POCl3 substrates per year, >2.4 million 156mm sq. PECVD substrates per year and high volume dry oxidation

Designed Specifically for the Solar Industry, incorporates one PECVD ARC tube level, one POCl3 tube level, one dry oxidation tube level and one de-populated tube level

Optional capability for depositing a dual refractive index PECVD nitride film (process included) producing one of the most efficient A/R coatings available

Variable pulse duration 450KHz RF power allows optimizing ARC film characteristics. Dual frequency RF power supplies available

Cantilever auto-loaders on each atmospheric tube level

Compact—<44 ft2 floor space for complete system

PC-controlled for functional capability and ease of operation

HOST computer with color monitor and keyboard/mouse controls

Self Cleaning RF Electrode Design on PECVD process tube level

Exclusive Shadowless™ button design eliminates PECVD shadows

PECVD boat design accommodates multiple substrate sizes

Water Cooled PECVD tube flanges optimize O-Ring life

Process tubes with 8” dia./156mm square substrate processing capability

Processes either poly-crystalline or mono-crystalline substrates

Fully automatic insertion/retraction of pre-loaded atmospheric boats

Incorporates proven technologies developed over the last 40 years in semiconductor and solar industries

Start-Up Assistance and qualification at customers facility available