Lam Research Corporation A4
with TCP9400 SE and 4520XL Process Modules
Wafer Diameter 200 mm
Operational Status Operational
LamResearchCorporation TCP9400SE / 4520XL
Process Etch, Oxide, Poly
System Power Rating 208 VAC 3-Phase
Loading Configuration Dual VCE Loader
Robot Brooks
Pump Stack BOC Edwards Q-Controller w/ iQDP80 and QMB250
RF Power Rack ENI Genesis GEW2527MA-B1C00-L1 Rev E2,
ENIGW2502MA-B1C001-L2
Turbo PumpController Osaka TC440
ElectricalDistribution Cabinet
Gas Cabinets
Process Modules 4520XL, TCP9400SE, can accommodate up to 4 PMs
4520XL Module Dual Frequency Advanced Oxide RIE (Reactive Ion Etch)
Variable Gap
Process pressure 30 - 150mtorr
ESC
HGP – Helical Groove Pump
Chamber and wafer area manometers
Helium backside cooling
Up to 8 Gases
TCP9400SE Polysilicon Etch, Low Density, High Pressure Planar Plasma Source
Fixed Gap
Process pressure 2 – 40mtorr
Heated Chamber and Vacuum Hardware
Heated Chamber Manometer – 100mtorr
Seiko Seki Turbomolecular Pump
200mm TCP Coil Upper Match
Mini Match on Lower Electrode
Process Configuration
Description Chemicals / Gases Used
Chamber Position 1 2 Loadlock ports at atmosphere &Vac N/A
Chamber Position 2 Transfer module N2
Chamber Position 3 Process chamber 1 O2 N2 HE CL2 HBr Freon
Chamber Position 4 Process chamber 2 O2 C4F8 Freon CO Freon23-Argon
Tool currently barrier bagged, crated and stored in our warehouse. Tool is in excellent , almost new condition.
Company: Global Fab Surplus Semiconductor Equipment LLC Contact Name: David Lee Status:Premium Member
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Ad Number: 105125
About this LAM Research LRC A4 Alliance 4520XL TCP9400SE listing - This is a for sale classified ad for a used, surplus or second hand LAM Research LRC A4 Alliance 4520XL TCP9400SE equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this LAM Research LRC A4 Alliance 4520XL TCP9400SE listing or view this user's member profile for detailed contact info.
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