LAM Research LRC TCP9400SE Poly Etch Chamber. Originally installed on LAM Alliance A4 Module. Can be installed on either Alliance A4 or A6. Polysilicon Etch, Low Density, High Pressure Planar Plasma Source Fixed Gap Process pressure 2 – 40mtorr Heated Chamber and Vacuum Hardware Heated Chamber Manometer – 100mtorrSeiko Seki Turbomolecular Pump 200mm TCP Coil Upper Match Mini Match on Lower Electrode
Global Fab Surplus Semiconductor Equipment
Company: Global Fab Surplus Semiconductor Equipment LLC Contact Name: David Lee Status:Premium Member
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Ad Number: 112148
About this LAM Research LRC TCP9400SE listing - This is a for sale classified ad for a used, surplus or second hand LAM Research LRC TCP9400SE equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this LAM Research LRC TCP9400SE listing or view this user's member profile for detailed contact info.
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