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TCP 9400 SE

Statistics: views/answers:131/0
Posted by:
dni
Location:
Asia and Pacific - South Korea
Ad Status:
Active

Manufacturer:
Type:
Model:
TCP 9400
Year (or range of years):
1995
Condition:
Good
Price (in US dollars):
110000 USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
MODEL: LAM TCP 9400 SE
PROCESS: POLY
SOFTWARE: CLASSIC
PLATFORM: STANDARD STAND-ALONE
WAFER SIZE: 200MM
WAFER SHAPE: FLAT ZONE (CONVERTIBLE)
INDEXER: HINE 38A
GAP: FIXED
ESC: 1 ESC CHUCK
TURBO PUMP: NONE
PROCESS KIT: NEW(6",8"convertible)
PRESSURE MANOMETER: MKS 1.0 Torr
PRESSURE CONTROLLER: VAT65 PENDULUM GATE VALVE (CONVERTIBLE)
EPD: DUAL CHANNELS 703,520NM
MATCHER: AUTO TUNER/ T MATCHER FOR UPPER, 8 TURN RF COIL MATCHER FOR BIAS
GENERATOR: HALO 1250/ RFG 1250
HELIUM BACK SIDE COOLING: 50ccm UPC(UNIT 1330)
ORBITAL GAS BOX: UFC-8160
O2: 500 SCCM
CF4: 100
He: 20
He: 20
HBr: 200
CI2: 100
HBr: 200
O2: 500

CHAMBER & TRANSFER UNITS ARE REFURBISHED

Company: dnisolution
Contact Name: sunglae kang
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Member Details

Ad Number: 117709
About this LAM RESEARCH TCP 9400 listing - This is a for sale classified ad for a used, surplus or second hand LAM RESEARCH TCP 9400 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this LAM RESEARCH TCP 9400 listing or view this user's member profile for detailed contact info.
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