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AMAT Centura 5200 Etch

Statistics: views/answers:2366/5
Posted by:
levyr
Location:
New Jersey
Ad Status:
New!

Manufacturer:
Type:
Centura 5200
Model:
Etch
Year (or range of years):
1998
Condition:
Excellent
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
Centura 5200 Dielectric Etcher (200mm) configured as follows:

•CH-A: IPS
•CH-C: eMAX, oxide etch chamber
•CH-D: eMXP+, enhanced MXP+ oxide etch chamber
•CH-F: remote orientor/center finder
•Mainframe: Centura mainframe
•Gas panel: Centura gas panel with Seriplex control
•Narrow body tilt-out loadlocks
•Remote frame, Centura VME rack with turbo controllers and Centura RF generator rack
•Four vacuum pumps: CH-C, CH-D,loadlock, and X-fer chamber
•Neslab HX-150 chiller for CH-D wall, Neslab HX-150 chiller for CH-D cathode
•BEA Aerospace chiller for CH-C wall and cathode

For additional photos, please refer to our website:

www.photonicmicrodevices.com

Company: Photonic Microdevices Inc.
Contact Name: Roland Levy
Status: Premium Member
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Ad Number: 129375

About this Applied Materials Etch listing

- This is a for sale classified ad for a used, surplus or second hand Applied Materials Etch equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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