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AMAT Centura 5200 eMXP Etch

Statistics: views/answers:1499/1
Posted by:
levyr
Location:
New Jersey
Ad Status:
New!

Manufacturer:
Type:
Centura 5200
Model:
eMXP Etch
Year (or range of years):
1997
Condition:
Excellent
Price (in US dollars):
USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
Centura 5200 eMXP Etcher, 200mm configured as follows:

•CH-A: eMXP+, enhanced MXP+ oxide etch chamber
•CH-B: DPS, Polysilicon DPS etch, version D1
•CH-F: remote orientor/center finder
•Mainframe: Centura mainframe
•Gas panel: Centura gas panel with Seriplex control
•Narrow body tilt-out loadlocks
•Remote frame, Centura VME rack with turbo controllers and Centura RF generator rack
•Four Vacuum pumps: CH-A, CH-B, loadlock, and X-Fer chamber
•Three Neslab chillers (model HX-150) for MXP cathode, DPS cathode, and walls.
•One AMAT heat exchanger (model 186363) for CH-B wall 65C temp capability

For additional photos, please refer to our website:

www.photonicmicrodevices.com

Company: Photonic Microdevices Inc.
Contact Name: Roland Levy
Status: Premium Member
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Ad Number: 129376

About this Applied Materials eMXP Etch listing

- This is a for sale classified ad for a used, surplus or second hand Applied Materials eMXP Etch equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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