2005 March C Plasma Etcher

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CER-LLC

Location:

Massachusetts

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SOLD

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Description:

MARCH C-Series Plasma Etcher
C-Series Plasma Treatment System
Manufacturer: March
Model: C Series
Serial: 101
Date of Manufacture: 2005
Treatment System
Chamber Enclosure
Vacuum Module
Stokes 212 Vacuum Pump (Model: 900-212-F44 BOC Edwards Stokes Vacuum)
Stokes 622 Vacuum Blower (Model: 900-622-MVR101 BOC Edward Pump)
C213T17DB46C Leeson Motor
NRY07F000 BOC Edwards Oxygen Pump
CL3504 Baldor Motor
Vibration Absorbtion Plate
Control Panel
Additional Specs from original quote:

1.0 1.0 Vacuum Chamber (36” X 47” X 36”)
1.1 Tru-Temp Electrodes
1.2 150/1300 CFM Oxygen Service Pumping Package
1.4 P2CIM Computer Controller with Windows 2000 Professional
1.5 Gas Control System with Three Mass Flows and Three Low Gas Alarms
1.6 Cross Pumping
1.7 Power Failure Safeguard
1.8 Gas Input Manifolding
1.9 AC Tech Inverter
1.10 Change 6” Gate Valve to 6” Right Angle Valve
1.11 Water Pumping
1.12 10” Flanges w/6 Reducers and Sweeps
1.13 Manometer/Valving/Dual Set Point Vacuum Gauge
1.14 Deflector Air Inlet
1.15 Teflon Seals
1.16 Isolation Chamber Bottom
1.17 Relief Valve for Electrodes
1.18 Six (6) Inch Flanges on Manifold
1.19 Dual Stage Oil Filter w/Oil
1.20 Additional Chamber Penetration
This is what I know about the system... It was built by March Plasma for a company called Hutchinson Technology. They actually produced about 25 of these unit for them that were identical. The per unit cost on these back in 2005 was over $200,000.00 a piece...
The system has a 2" thick Aluminum Vacuum Chamber that measure 36" x 47" x 36", a beautiful Stokes 1721 Vacuum pumping package, all interconnecting lines and controls.
This system is almost new!