BellJar EBeam Vacuum System

Posted by:

CER-LLC

Location:

Massachusetts

Ad Status:

SOLD

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

Up for sale is a CHA Airco Temescal Belljar Style E Beam Deposition High Vacuum System. System was removed from a research laboratory that downsized and no longer needed this particular unit at their much smaller research facility.

General System Information:

CHAMBER:

BellJar Style, 24" dia x 30"T , 6" Dia wipered view port, Copper water traced, Chamber is on hydraulic lift arm

CONTROLS:

Inficon IC 6000 control unit

Veeco TG-70 TC Control

Veeco RG-830 Ion Gauge Control (range 10 to minus 10 torr)

Varian 860 Cold Cathode Vac Gauge (range 10 to minus 7 torr)

CHA Industries Auto Tech II Vacuum and Hydraulic control

Omega 650 Type J Thermocouple Temp Controller

Glow Discharge Controller

POWER SUPPLY CABINET:

DC Current

Airco Temescal ES-6 E Beam Power Supply

Model: ES-6A-110

Serial# : 6-1012

Project No: Q-027

NOTE: Has remote gun control unit

ELEC SPECS:

208 V 3 Ph 60 Amp

9.0 KVA

VACUUM SYSTEM:

VHS High Speed Diffusion Pump

NOTE: No rough pump on system. We can quote a suitable rough pump seperately.

This system is sold as is. I am happy to offer shipping freight collect on our 75% discount via RL carriers to save money on shipping. This system would make a great high vacuum chamber with many possibilities for numerous research or small scale production processes.