March PX-500 Plasma Treatment/Etcher System Cleaner

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testeqe

Location:

Arizona

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SOLD

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Description:

March PX-500 (Inset) Plasma Treatment/Cleaning System

This unit is in like brand new condition. It is guaranteed to be non-DOA. There is no RF Generator present but you can use an Advanced Energy RFX-600 which is priced around $2000 - $3000 from a used source.

The Unit's Serial Number Tag Reads:
Model Number: PX-500
Serial Number: 8102
Date of Manufacturer: 4/99
Power Requirements: 220 VAC, 20 A, 50/60 Hz, Single Phase

Description:
March is the leader in gas plasma technology. Successful implementation of plasma technology to improve yield and reliability depends on expert knowledge in both packaging and plasma science. The PX-Series bath systems from March incorporate over 20 years of applications experience in RF plasma technology.

Applications:
Gas plasma treatment provides a fast, efficient method for surface treatment and cleaning prior to wire bonding, die attach, encapsulation, conformal coating and other processes. Plasma processing enhances lamination bond strength, improves wire bond strength and uniformity, promotes underfil adhesion and enhances die attach.

The PX-Series is ideal for plasma treatment of:
# Hybrids
# BGAs
# Optics
# Flex Circuit Panel
# Medical/Device
# Flat Panel Displays
# Lead Frames
# Multi-chip Modules
# Plastics
# Automotive

Chamber Design:
The chamber is constructed of stainless steel that is resistant to chemicals and easy to clean. Multiple removable shelves can easily be configured to provide downstream or direct plasma.

Power and Matching Network:
Different applications require different configurations and power densities. The PX-Series system is equipped with an automatic impedance matching network for ease of operation and consistent results. RF power supplies are available in either 300 or 600 watts depending on application requirements.

Safety:
An emergency shut-off button, located on the front panel, immediately terminates the gas flow and RF power. Safety interlocks prevent activation of RF power when the chamber door is open. Safe viewing is ensured with a separate, full-length glass door that shields operators from plasma-generated UV energy.

Specifications:
Dimensions: 660 mm W x 508 mm H x 775 mm D (26" x 20" x 30.5" D)
Weight: 83.9 kg. (185 lbs.)
Stainless Steel Chamber Size: 305 mm W x 305 mm H x 508 mm D (12" x 12" x 20"), Max. 3 adjustable electrodes/shelves: 209.6 mm x 330 mm (8.25" x 13.0")
RF Power: 13.56 MHz @ 600 W, Solid-state
Controller System: Microprocessor Controlled, Manual flow controllers
Pump System Needed: 27 CFM