Aura 3010.The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).3”, 4”, 5”, 6” and 8”wafer capability .
• No RF damage (£0.1 volt CV shift)
• High throughput
• Front and backside etching
• Excellent etch rates and uniformities
• 150mm – 200mm wafer capability
• 3 gas MFC
• Variable platen temperature
• Alumina (ceramic) plasma tube
• Well-characterized process
• Multiple step process capability
• High capital productivity.
• Chamber wall heated and temperature controlled to make better repeatability.
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Allwin21 Corp. can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Gasonics Aura 3010 which provides the significant advantages.
Allwin21 Corp can provide the following refurbished plasma asher/descum equipment.
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About this Refurbished by Allwin21 Gasonics Aura 3010 listing - This is a for sale classified ad for a used, surplus or second hand Refurbished by Allwin21 Gasonics Aura 3010 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Refurbished by Allwin21 Gasonics Aura 3010 listing or view this user's member profile for detailed contact info.
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