Gasonics is a Registered Trademark of Novellus Corp. Gasonics Aura 2000LL is a 8" Cassette to Cassette ,Single Wafer Downstream Microwave Asher w/ Loadlock with microwave source and a dictated reactor chamber ,8" Cassette to Cassette ,Single Wafer Asher ,Configured for 4" - 8" wafers,Loadlock with cool-down station for processed wafer Gas box, designed to hold 4 MFC's capability (System includes 2 MFC's calibrated to customer gas specifications Downstream endpoint detection Rear access with control panel for servicing .No RF damage (0.1 VOLT CV SHIFT) Front and backside etching .Variable platen temperature Alumina (ceramic) Plasma Tube Fluorine compatible chamber Multiple step process capability.
Allwin21 Corp can provide the following refurbished plasma asher/descum equipment.
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About this Refurbished by Allwin21 Gasonics Aura 2000LL listing - This is a for sale classified ad for a used, surplus or second hand Refurbished by Allwin21 Gasonics Aura 2000LL equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Refurbished by Allwin21 Gasonics Aura 2000LL listing or view this user's member profile for detailed contact info.
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