2 March C-Series Plasma Etchers: New in 2005

Posted by:

CER-LLC

Location:

Massachusetts

Ad Status:

SOLD

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Description:

March C-Series Plasma Etchers (Qty 2)

New in 2005
Includes:

36" x 36" x 48" High Aluminum Vacuum CHambers mounted on Mild Steel frame.

Two (2) PEII 10K 40KHz Power Supplies with Cables and RF Feedthrus

MKS 947 Digital Convection Vacuum Gage with Pirani Baratron Head

All electrical components to run the system (Less Computer).

Mass Flow Controllers

Lots of KF Fittings and valve controls

Manuals
What is not included:

PC with Software. The units had the PC removed as it had the owners programs on it. I have been in contact with March and they stated it used a Standard Dell PC and they were willing to sell a copy of the software, but it will be up to you to get this from them.

Vacuum Pumps.... Sorry, already sold them separately. A Stokes 212 pumps were originally used for these system.
If you add these two items, you will have functioning plasma etchers!

These units are in great condition, inside and out. Original cost was $225,000 per unit just a couple years ago... So here is your chance to save a bundle.