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PMT APEX7000

:114/0

Posted by:	spiderseo
Location:	Asia and Pacific - All
Ad Status:	Closed

Manufacturer:	PMT
Type:
Model:	APEX7000
Year (or range of years):	1994
Condition:	Good
Price (in US dollars):	USD
Quantity:	1
Type of Seller:	Dealer Owner

Description:
Maker PMT ( USA ) Model APEX7000 Vintage 1994 Back bone Brooks automation One Vacuum cassette Load lock. Vacuum Transfer Chamber with Single arm brooks robot Pre align module Process chamber Plasma Source ICP MORI source Source generator RFPP / 3000W 13.65MHz Bias generator RFPP / 500W 13.56MHz Source Match RFPP / Auto match Bias Match Trazar / Auto match DC coil ( inner and outer ) Sorensen / DCS 8-125 Throtle valve VAT / PM5 Turbo pump Seiko seiki / H1000C Moving chuck ESC or Mech Clamp Back side He control EPD Monocrometor Gas box ( 6 gas line ) MFC : Unit Software PC bace OS: QNX

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About this PMT APEX7000 listing

- This is a for sale classified ad for a used, surplus or second hand PMT APEX7000 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.